193nm CD Shrinking Under SEM: Modeling the Mechanism | サイプレス セミコンダクタ
193nm CD Shrinking Under SEM: Modeling the Mechanism
Copyright 2002 Society of Photo-Optical Instrumentation Engineers.
This paper was published in SPIE Microlithography and is made available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
SPIE Microlithography and Conference 2002